The technology and equipment of the vacuum sputtering coating have the extremely broad application and the development in the future.
真空溅射镀膜技术及设备在当今和未来都拥有十分广阔的应用领域和发展前景。
Based on the low evaporation temperature of organic semiconductors, a radioactive heater-crucible assembly was developed for vacuum evaporation coating and sputtering coating systems.
针对有机半导体材料的蒸发温度低的特点，设计并制作了低温辐射式加热器。
Further more, the increase of B reduced greatly the touching off and keeping discharge voltages during magnetron sputtering coating, which gives another approach to lower voltage magnetron sputtering.
此外，B的增加显著降低了磁控溅射镀膜工艺的着火电压和维持放电电压，为实现低电压磁控溅射提供了另外一种思路。
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